The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2022

Filed:

Jul. 25, 2017
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, 's-Gravenhage, NL;

Inventors:

Gari Arutinov, Eindhoven, NL;

Edsger Constant Pieter Smits, Eindhoven, NL;

Jeroen van den Brand, Goirle, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 1/00 (2006.01); H01L 23/00 (2006.01); H05K 3/34 (2006.01); B23K 1/005 (2006.01); B23K 1/20 (2006.01); H01L 21/67 (2006.01); H01L 23/498 (2006.01); H01L 33/62 (2010.01); B23K 101/42 (2006.01);
U.S. Cl.
CPC ...
H01L 24/81 (2013.01); B23K 1/005 (2013.01); B23K 1/0016 (2013.01); B23K 1/0053 (2013.01); B23K 1/20 (2013.01); H01L 21/67115 (2013.01); H01L 23/4985 (2013.01); H01L 24/74 (2013.01); H01L 24/75 (2013.01); H01L 24/80 (2013.01); H01L 33/62 (2013.01); H05K 3/3494 (2013.01); B23K 2101/42 (2018.08); H01L 2224/133 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/75 (2013.01); H01L 2224/7525 (2013.01); H01L 2224/75251 (2013.01); H01L 2224/75262 (2013.01); H01L 2224/75651 (2013.01); H01L 2224/75901 (2013.01); H01L 2224/81 (2013.01); H01L 2224/8122 (2013.01); H01L 2224/81048 (2013.01); H01L 2224/81192 (2013.01); H01L 2224/81815 (2013.01); H01L 2224/95115 (2013.01); H01L 2924/12041 (2013.01); H01L 2924/14 (2013.01); H01L 2933/0066 (2013.01); H05K 2201/10674 (2013.01); H05K 2203/1545 (2013.01);
Abstract

A method and system for heat bonding a chip to a substrate by means of heat bonding material disposed there between. At least the substrate is preheated from an initial temperature to an elevated temperature below a damage temperature of the substrate. A light pulse applied to the chip momentarily increases the chip temperature to a pulsed peak temperature below a peak damage temperature of the chip. The momentarily increased pulsed peak temperature of the chip causes a flow of conducted heat from the chip to the bonding material, causing the bonding material to form a bond.


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