The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2022
Filed:
Apr. 14, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Wendell Glenn Boyd, Jr., Morgan Hill, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Teng-Fang Kuo, Santa Clara, CA (US);
Zhenwen Ding, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/687 (2006.01); C03C 17/00 (2006.01); G03F 7/20 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); C03C 17/00 (2013.01); H01L 21/6875 (2013.01); H01L 21/68757 (2013.01); G03F 7/707 (2013.01); H01L 21/683 (2013.01); H01L 21/6831 (2013.01); H02N 13/00 (2013.01);
Abstract
An electrostatic chuck comprises a ceramic body comprising an embedded electrode and a first ceramic coating on a surface of the ceramic body, wherein the first ceramic coating fills pores in the ceramic body. The electrostatic chuck further comprises a second ceramic coating on the first ceramic coating and a plurality of elliptical mesas on the second ceramic coating, the plurality of elliptical mesas having rounded edges.