The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2022
Filed:
Sep. 21, 2017
Applicant:
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Inventors:
Hirohiko Goto, Akashi, JP;
Tetsuya Yoshida, Kakogawa, JP;
Haruhiko Tan, Kobe, JP;
Kazuo Fujimori, Akashi, JP;
Katsuhiro Yamashita, Kakogawa, JP;
Masahiko Sumitomo, Kakogawa, JP;
Assignee:
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G06T 7/13 (2017.01); G06T 7/70 (2017.01); B65G 47/90 (2006.01); G06T 7/00 (2017.01); H01L 21/677 (2006.01); H04N 5/225 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67288 (2013.01); B65G 47/905 (2013.01); G06T 7/001 (2013.01); G06T 7/13 (2017.01); G06T 7/70 (2017.01); H01L 21/677 (2013.01); H04N 5/2253 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30244 (2013.01);
Abstract
A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.