The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2022

Filed:

Feb. 25, 2020
Applicant:

Microsoft Technology Licensing, Llc, Redmond, WA (US);

Inventors:

Geoffrey C. Gardner, West Lafayette, IN (US);

Raymond L. Kallaher, West Lafayette, IN (US);

Sergei V. Gronin, West Lafayette, IN (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); H01L 27/18 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02603 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); H01L 27/18 (2013.01); H01L 29/0669 (2013.01);
Abstract

A method for manufacturing a nanowire includes providing a sacrificial substrate, providing a patterned mask layer on the sacrificial substrate, providing a nanowire on the sacrificial substrate through an opening in the patterned mask layer, and removing the sacrificial substrate. Because the sacrificial substrate is used for growing the nanowire and later removed, the material of the sacrificial substrate can be chosen to be lattice matched with the material of the nanowire without regard to the electrical properties thereof. Accordingly, a high-quality nanowire can be grown and operated without the degradation in performance normally experienced when using a lattice matched substrate.


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