The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2022
Filed:
Sep. 04, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Dawei Sun, Nashua, NH (US);
D. Jeffrey Lischer, Gloucester, MA (US);
Qin Chen, Gloucester, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
Steven Anella, West Newbury, MA (US);
Ron Serisky, Gloucester, MA (US);
Chi-Yang Cheng, Gloucester, MA (US);
Assignee:
APPLIED Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01K 1/16 (2006.01); G01J 5/02 (2022.01); G01J 5/10 (2006.01); G01K 7/02 (2021.01);
U.S. Cl.
CPC ...
G01K 1/16 (2013.01); G01J 5/0205 (2013.01); G01J 5/10 (2013.01); G01K 7/02 (2013.01);
Abstract
A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.