The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2022
Filed:
Jul. 12, 2018
Applicant:
Carl Zeiss Ag, Oberkochen, DE;
Inventors:
Assignee:
MIRRORCLE TECHNOLOGIES, INC., Richmond, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); H02N 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0078 (2013.01); H02N 1/008 (2013.01); B81B 2201/04 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/058 (2013.01);
Abstract
MEMS devices include fluid confinement structures on either a fixed part of a substrate and/or on a suspended element. The fluid confinement structures may be configured to confine a viscoelastic fluid in a limited part of a gap between one or more vertical sidewalls of both the fixed part of the substrate and either the suspended element or the drive beam or both the suspended element and drive beam such that one part of the gap is bridged by the fluid and another part of the gap is not, The structures may be configured to prevent flow of the fluid to other parts of the gap.