The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2022
Filed:
Jun. 07, 2017
Jsw Aktina System Co., Ltd., Yokohama, JP;
JSW AKTINA SYSTEM CO., LTD., Yokohama, JP;
Abstract
According to one embodiment, a laser lift-off apparatus () which irradiates with laser light () from a side of a substrate () an interface between the substrate () and a separating layer () of a workpiece () including the substrate () and the separating layer () formed over the substrate (), and separates the separating layer () from the substrate () includes: an injection unit () which blows a gas () onto the workpiece () and blows away dusts existing on a surface of the workpiece (), and a dust collecting unit () which includes an opening () at a position meeting an irradiation position of the laser light (), and sucks and collects the blown dusts through the opening ().