The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 2022

Filed:

Jun. 30, 2020
Applicant:

Boe Technology Group Co., Ltd., Beijing, CN;

Inventor:

Jianye Zhang, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01); H01L 21/768 (2006.01); H01L 27/12 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31144 (2013.01); H01L 21/31116 (2013.01); H01L 21/76804 (2013.01); H01L 27/1248 (2013.01); H01L 27/1288 (2013.01); H01L 27/3258 (2013.01);
Abstract

A display substrate, a manufacturing method thereof, a display panel, and a display device are provided. The method for manufacturing a display substrate includes: forming a thin film transistor on a base substrate; forming a planarization layer covering the thin film transistor; forming a metal mask layer on the planarization layer; patterning the metal mask layer to form an etching hole in the metal mask layer, the etching hole exposing a portion of the planarization layer; etching the portion of the planarization layer exposed by the etching hole to form a first via hole penetrating the planarization layer, and removing a remaining metal mask layer on the planarization layer.


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