The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 2022

Filed:

May. 08, 2018
Applicant:

Ametek Finland Oy, Espoo, FI;

Inventors:

Jari Kostamo, Turenki, FI;

Heikki Sipilä, Espoo, FI;

Assignee:

AMETEK Finland Oy, Espoo, FI;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 47/00 (2006.01); H01J 5/18 (2006.01); H01J 35/18 (2006.01);
U.S. Cl.
CPC ...
H01J 47/004 (2013.01); H01J 5/18 (2013.01); B32B 2260/025 (2013.01); B32B 2260/046 (2013.01); H01J 35/18 (2013.01);
Abstract

A method is for manufacturing a multilayer radiation window for an X-ray measurement apparatus. The method includes: producing a gas diffusion stop layer made of silicon nitride on a polished surface of a carrier; producing at least one combined layer on an opposite side of the gas diffusion stop layer than the carrier; attaching the combined structure including the carrier, the gas diffusion stop layer, the at least one combined layer to a region around an opening in a support structure with the at least one combined layer facing the support structure; and etching away the carrier. The at least one combined layer includes: a light attenuation layer made of aluminium, and a strengthening layer. A radiation window is manufactured with the method.


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