The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
Apr. 08, 2021
Applicant:
Flow Devices and Systems Inc., Yorba Linda, CA (US);
Inventors:
Bhushan Somani, Yorba Linda, CA (US);
Christophe Ellec, Yorba Linda, CA (US);
Eric J. Redemann, Yorba Linda, CA (US);
Assignee:
FLOW DEVICES AND SYSTEMS INC., Yorba Linda, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 7/06 (2006.01); G01F 1/684 (2006.01); G01F 15/00 (2006.01); G05D 16/00 (2006.01); G01F 1/36 (2006.01); G01F 1/86 (2006.01); G01F 1/88 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0623 (2013.01); G01F 1/36 (2013.01); G01F 1/6842 (2013.01); G01F 1/86 (2013.01); G01F 1/88 (2013.01); G01F 15/005 (2013.01); G05D 7/0647 (2013.01); G05D 16/00 (2013.01); G05D 16/024 (2019.01);
Abstract
A mass flow control apparatus is capable of controlling a flow rate of a fluid to a tool. Pressure of the fluid is regulated by a solenoid valve, which receives signals from a control module. Various set points may be inputted to the control module, whereby control module receives pressure sensor signals from across a flow restrictor and adjusts the solenoid valve to control the fluid flow rate to equal a set point.