The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
Feb. 03, 2021
Applicant:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventors:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C08F 212/14 (2006.01); C08F 220/18 (2006.01); C07C 309/06 (2006.01); C07C 309/17 (2006.01); C07C 381/12 (2006.01); C07D 307/00 (2006.01); C07D 321/10 (2006.01); C07D 327/04 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 309/06 (2013.01); C07C 309/17 (2013.01); C07C 381/12 (2013.01); C07D 307/00 (2013.01); C07D 321/10 (2013.01); C07D 327/04 (2013.01); C08F 212/22 (2020.02); C08F 220/1808 (2020.02); C07C 2603/74 (2017.05);
Abstract
Disclosed are a salt represented by formula (I), and an acid generator and a resist composition which include the same: