The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
Sep. 09, 2020
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Inventors:
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 15/18 (2013.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); G01P 15/18 (2013.01); G01P 2015/0814 (2013.01); G01P 2015/0831 (2013.01); G01P 2015/0848 (2013.01);
Abstract
The present invention provides a high-accuracy low-noise MEMS accelerometer by using at least two symmetric out-of-plane proof masses for both out-of-plane and in-plane axes. Movement of the proof masses in one or more in-plane sense axes is measured by comb capacitors with mirrored comb electrodes that minimise cross-axis error from in-plane movement of the proof mass out of the sense axis of the capacitor. The two out-of-plane proof masses rotate in opposite directions, thus maintaining their combined centre of mass at the centre of the accelerometer even as they rotate out of plane.