The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
Aug. 14, 2020
Applicants:
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E. V., Munich, DE;
Friedrich-schiller-universität Jena, Jena, DE;
Inventors:
Sven Stempfhuber, Jena, DE;
Dieter Gäbler, Jena, DE;
Paul Schmitt, Jena, DE;
Peter Munzert, Jena, DE;
Stefan Schwinde, Jena, DE;
Assignees:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/02 (2006.01); C23C 14/16 (2006.01); C23C 14/58 (2006.01); G02B 1/14 (2015.01); G02B 5/08 (2006.01); C23C 14/14 (2006.01); C23C 14/30 (2006.01);
U.S. Cl.
CPC ...
C23C 14/025 (2013.01); C23C 14/021 (2013.01); C23C 14/14 (2013.01); C23C 14/16 (2013.01); C23C 14/30 (2013.01); C23C 14/58 (2013.01); G02B 1/14 (2015.01); G02B 5/08 (2013.01); G02B 5/0808 (2013.01); G02B 5/0891 (2013.01);
Abstract
A method for producing an aluminum layer is provided. The method includes depositing a metallic seed layer on a substrate, the seed layer having a thickness of not more than 5 nm, and also includes applying the aluminum layer to the seed layer, wherein the aluminum layer has a thickness of more than 30 nm. Further, an optical element, which can be a mirror layer, is provided including the metallic seed layer and the aluminum layer.