The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
May. 29, 2019
Applicant:
Merck Patent Gmbh, Darmstadt, DE;
Inventors:
Takashi Fujiwara, Kakegawa, JP;
Yuji Tashiro, Fujimino, JP;
Assignee:
MERCK PATENT GMBH, Darmstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08G 77/06 (2006.01); C08G 77/62 (2006.01); C08G 77/452 (2006.01);
U.S. Cl.
CPC ...
C08G 77/62 (2013.01); C08G 77/452 (2013.01); C08G 77/06 (2013.01);
Abstract
[Problem] To provide a novel polymer, which fills trenches having narrow widths and high aspect ratios and can form a thicker film. [Means for Solution] The block copolymer comprises a linear or cyclic block A having a polysilane skeleton comprising 5 or more silicon and a block B having a polysilazane skeleton comprising 20 or more silicon.