The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2022
Filed:
Oct. 30, 2019
Milaebo Co., Ltd., Pyeongtaek-si, KR;
MILAEBO CO., LTD., Pyeongtaek-si, KR;
Abstract
Disclosed is an apparatus having a cooling line for collecting a by-product in a semiconductor manufacturing process. The apparatus includes: a housing () including an inner wall plate () on an inner wall thereof to collect a by-product while generating a vortex in exhaust gas which is temperature-controlled by a heater () while being introduced through a gas inlet of an upper plate; an internal collecting tower () including vertical plates, an upper cover plate, and vortex plates fitted to the vertical plates, and condensing the introduced exhaust gas to collect the by-product; a main cooling channel () cooling the exhaust gas by using coolant while passing through the internal collecting tower (); and a multi-connection pipe () sequentially supplying the coolant to an upper plate cooling channel and a main cooling channel and discharging the coolant, by using a supply pipe and a discharge pipe provided outside the housing.