The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2022
Filed:
Apr. 10, 2020
Samsung Electronics Co., Ltd., Suwon-si, KR;
Nohsung Kwak, Suwon-si, KR;
Euijin Seo, Incheon, KR;
Jonghwi Seo, Suwon-si, KR;
Jaehee Lee, Daegu, KR;
Ilyoung Han, Uiwang-si, KR;
Guesuk Lee, Seoul, KR;
SAMSUNG ELECTRONICS CO., LTD., Yongin-si, KR;
Abstract
A semiconductor manufacturing apparatus is provided including a beam shaper arranged on a light path of a laser beam and including a plurality of mask modules. The plurality of mask modules defines a light blocking region and a light transmitting region. At least one mask module of the plurality of mask modules includes a blocking plate configured to block a portion of the laser beam, and a driver is configured to move the blocking plate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile