The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 2022

Filed:

Jun. 25, 2020
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Satoru Tanaka, Chino, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); B81B 3/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); B81B 3/0008 (2013.01); G01P 2015/084 (2013.01); G01P 2015/0831 (2013.01);
Abstract

An inertial sensor includes a substrate, a movable element that swings around a swing axis; and a protrusion that overlaps with the movable element in the plan view and protrudes from the substrate toward the movable element. The protrusion includes a first protrusion and a second protrusion so located as to be farther from the swing axis than the first protrusion, and when the movable element swings relative to the substrate around the swing axis, the first protrusion and the second protrusion come into contact with the movable element at the same time or the first protrusion comes into contact with the movable element and then the second protrusion comes into contact with the movable element.


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