The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 2022

Filed:

Aug. 09, 2019
Applicant:

Minebea Mitsumi Inc., Nagano, JP;

Inventor:

Taketomo Nakane, Tokyo, JP;

Assignee:

MINEBEA MITSUMI Inc., Nagano, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01); H01L 29/36 (2006.01); G01K 7/16 (2006.01); G01K 7/01 (2006.01);
U.S. Cl.
CPC ...
G01N 27/223 (2013.01); G01K 7/01 (2013.01); G01K 7/16 (2013.01); H01L 29/36 (2013.01);
Abstract

A humidity detecting device includes a semiconductor substrate including at least one impurity diffusion layer, a heating unit formed by the at least one impurity diffusion layer, and a humidity detecting unit. The humidity detecting unit includes a plurality of insulating films laminated on the semiconductor substrate, a lower electrode disposed over the heating unit via a first insulating film among the insulating films, a humidity sensitive film disposed on a second insulating film among the insulating films, so as to cover the lower electrode, and an upper electrode disposed on the humidity sensitive film.


Find Patent Forward Citations

Nakane, Taketomo. (2022). Humidity detecting device and method of determining malfunction (U.S. Patent No. 11460428). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11460428

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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