The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2022
Filed:
Sep. 16, 2020
Mitsubishi Electric Corporation, Tokyo, JP;
Kimitoshi Sato, Tokyo, JP;
Mitsubishi Electric Corporation, Tokyo, JP;
Abstract
A semiconductor pressure sensor includes: a first semiconductor substrate; an insulating film provided on the first semiconductor substrate and including a main opening, an introduction opening, and a connection opening which connects the main opening and the introduction opening; a second semiconductor substrate bonded to the first semiconductor substrate with the insulating film interposed therebetween and including a diaphragm provided above the main opening and a receiving pressure inlet connected to the introduction opening; and a gauge resistor provided on the diaphragm and converting a deformation amount of the diaphragm into change in electrical characteristics.