The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 2022

Filed:

Feb. 19, 2020
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Jung Wook Lee, Yongin-si, KR;

Yeon Ju Kwon, Yongin-si, KR;

Do Hyun Kim, Yongin-si, KR;

Jung Soo Kim, Yongin-si, KR;

Ga Hee Park, Yongin-si, KR;

Ha Jun Song, Yongin-si, KR;

Do Yoon Lee, Yongin-si, KR;

Hun Hyeon Im, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 5/04 (2006.01); G03F 7/16 (2006.01); F26B 3/20 (2006.01);
U.S. Cl.
CPC ...
F26B 5/045 (2013.01); F26B 3/20 (2013.01); G03F 7/168 (2013.01);
Abstract

A vacuum dryer including a chamber configured to provide an interior space, support pins in the interior space proximate to a bottom of the chamber, a power supply configured to supply power to the support pins, and a pump coupled to the interior space in the chamber.


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