The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2022
Filed:
Feb. 14, 2020
Applicant:
Ckd Corporation, Komaki, JP;
Inventor:
Takeya Inagaki, Komaki, JP;
Assignee:
CKD CORPORATION, Komaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 23/34 (2006.01); B05D 3/04 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45561 (2013.01); B05D 3/04 (2013.01); B05D 3/0426 (2013.01); C23C 16/4405 (2013.01); H01L 23/34 (2013.01);
Abstract
A gas supply unit is configured such that when a first gas whose temperature has been controlled at a first temperature is supplied to a chamber through an upper device and then a second gas which starts a chemical reaction at a reaction start temperature lower than the first temperature is supplied to the chamber through the upper device, before cleaning gas is supplied to the chamber through the defined between a base plate and the upper device to cool the upper device down to the reaction start temperature or lower.