The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2022
Filed:
Mar. 31, 2020
Applicant:
Fortemedia, Inc., Santa Clara, CA (US);
Inventors:
Jien-Ming Chen, Tainan, TW;
Feng-Chia Hsu, Tainan, TW;
Wen-Shan Lin, Tainan, TW;
Hsin-Li Lee, Tainan, TW;
Nai-Hao Kuo, Tainan, TW;
Assignee:
FORTEMEDIA, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/00 (2006.01); B81B 3/00 (2006.01); H04R 19/04 (2006.01); H04R 7/04 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0072 (2013.01); H04R 7/04 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MEMS microphone includes a substrate, a backplate disposed on a side of the substrate, a diaphragm movably disposed between the substrate and the backplate, and a plurality of slots formed on the diaphragm. The slots are spaced apart from each other and have a non-constant width to relieve the residual stress on the diaphragm.