The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2022
Filed:
Jun. 21, 2017
Applicant:
Hitachi High-technologies Corporation, Tokyo, JP;
Inventors:
Akinari Morikawa, Tokyo, JP;
Kotaro Hosoya, Tokyo, JP;
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); H01J 37/20 (2006.01); H01J 37/26 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
B08B 7/0035 (2013.01); H01J 37/20 (2013.01); H01J 37/26 (2013.01); H01J 37/32862 (2013.01); H01J 2237/20207 (2013.01); H01J 2237/20214 (2013.01);
Abstract
To provide a charged particle beam apparatus. The charged particle beam apparatus includes: a stage on which a sample is placed; a cleaner configured to remove a contaminant on the sample; and a stage control unit configured to adjust a relative positional relationship between the cleaner and the sample by moving the stage during use of the cleaner.