The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2022

Filed:

May. 24, 2019
Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Masashi Goto, Nagoya, JP;

Tomoyoshi Tai, Inazawa, JP;

Takahiro Yamadera, Nagoya, JP;

Yuji Hori, Owariasahi, JP;

Keiichiro Asai, Nagoya, JP;

Masahiko Namerikawa, Seto, JP;

Takashi Yoshino, Ama, JP;

Assignee:

NGK INSULATORS, LTD., Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 41/18 (2006.01); C30B 29/30 (2006.01); H01L 41/312 (2013.01); H03H 3/08 (2006.01); H03H 9/05 (2006.01); H03H 9/25 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02574 (2013.01); C30B 29/30 (2013.01); H01L 41/18 (2013.01); H01L 41/312 (2013.01); H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/02622 (2013.01); H03H 9/059 (2013.01); H03H 9/0585 (2013.01); H03H 9/25 (2013.01);
Abstract

A piezoelectric monocrystalline substrate is composed of a material represented by LiAO(A represents at least one element selected from the group consisting of niobium and tantalum), a bonding layer is compose of a material of an oxide of at least one element selected from the group consisting of niobium and tantalum, and an interface layer is provided along an interface between the piezoelectric monocrystalline substrate 6 and bonding layer, and the interface layer has a composition of EO(E represents at least one element selected from the group consisting of niobium and tantalum and 0.29≤x≤0.89).


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