The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2022
Filed:
Jun. 02, 2020
Applicant:
Fujifilm Corporation, Tokyo, JP;
Inventors:
Keeyoung Park, Shizuoka, JP;
Atsushi Mizutani, Shizuoka, JP;
Assignee:
FUJIFILM CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); H01L 21/3065 (2006.01); H01L 21/308 (2006.01); H01L 43/08 (2006.01); H01L 27/105 (2006.01); C23F 1/40 (2006.01); C23F 4/00 (2006.01); C23F 1/30 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); C23F 1/30 (2013.01); C23F 1/40 (2013.01); C23F 4/00 (2013.01); H01L 21/308 (2013.01); H01L 21/3065 (2013.01); H01L 27/105 (2013.01); H01L 43/08 (2013.01);
Abstract
A treatment liquid contains orthoperiodic acid and water, and the pH is 11 or more. It is preferable that the content of orthoperiodic acid in the treatment liquid is 0.01% to 5% by mass with respect to the total mass of the treatment liquid.