The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2022
Filed:
Sep. 11, 2020
Canon Kabushiki Kaisha, Tokyo, JP;
Shinichi Shudo, Saitama, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus for performing an imprint process which forms an imprint material pattern on a substrate by using a mold, including a forming unit arranged around the mold and configured to form an air current that surrounds a space between the mold and the substrate, wherein the forming unit includes a first forming unit and a second forming unit which are independent of each other, and each of the first forming unit and the second forming unit includes an outlet which blows out gas for forming the air current from the side of the mold to the side of the substrate, and the first forming unit and the second forming unit include portions, respectively, which overlap each other in a direction away from the space.