The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2022

Filed:

Jun. 20, 2019
Applicant:

Via Mechanics, Ltd., Kanagawa, JP;

Inventors:

Kazuya Matsumoto, Kanagawa, JP;

Kazuo Watanabe, Kanagawa, JP;

Atsushi Sakamoto, Kanagawa, JP;

Masanori Sato, Kanagawa, JP;

Mitsuru Kato, Kanagawa, JP;

Masaru Kikuchi, Kanagawa, JP;

Assignee:

VIA MECHANICS, LTD., Kanagawa, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/11 (2006.01); H01S 3/00 (2006.01); B23K 26/382 (2014.01); H05K 3/00 (2006.01);
U.S. Cl.
CPC ...
G02F 1/113 (2013.01); B23K 26/382 (2015.10); H01S 3/0071 (2013.01); H05K 3/0044 (2013.01); H05K 2203/107 (2013.01);
Abstract

A laser processing apparatus disclosed in the present application includes: an optical deflection unit capable of changing a deflection direction of and outgoing energy of an incoming laser pulse by changes of a frequency of and an amplitude of a driving signal to be supplied; and a control unit configured to supply driving signals with amplitudes corresponding to respective frequencies. In a laser processing apparatus configured to process a workpiece by leading outgoing laser pulse of the optical deflection unit to the workpiece and irradiating the workpiece with the laser pulse, as the amplitude corresponding to each of the frequencies, the control unit supplies an amplitude having the ratio that is close to the lowest ratio among ratios of the outgoing energy with respect to the incoming energy of the laser pulse at an amplitude having the largest outgoing energy of the optical deflection unit.


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