The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2022

Filed:

Jul. 27, 2018
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventors:

Kazuma Watanabe, Kyoto, JP;

Keita Fujino, Kyoto, JP;

Masato Hirade, Kyoto, JP;

Kenji Yamasaki, Kyoto, JP;

Hideo Nakajima, Kyoto, JP;

Yuichiro Ikeda, Kyoto, JP;

Hiroshi Arai, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01);
U.S. Cl.
CPC ...
G01Q 20/02 (2013.01);
Abstract

A cantilever has a probe at a tip end. An optical system emits laser light to the cantilever and detects the laser light reflected by the cantilever. A measurement unit measures characteristics of a sample based on a displacement of the cantilever obtained by a change in a position of the laser light detected by the optical system. The laser light adjustment unit adjusts, when adjusting the optical axis of the laser light, a spot diameter of the laser light to be larger than the spot diameter when measuring the characteristics of a sample. The imaging unit captures an image of a range including the position of the probe when adjusting the optical axis of the laser light. The display unit displays the captured image.


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