The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2022

Filed:

Aug. 04, 2017
Applicant:

Encite Llc, Burlington, MA (US);

Inventor:

Stephen Alan Marsh, Carlisle, MA (US);

Assignee:

Encite LLC, Burlington, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); G01L 19/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0073 (2013.01); G01L 9/0072 (2013.01); G01L 19/00 (2013.01);
Abstract

A micro pressure sensor includes a body having a compartmentalized chamber provided by membranes anchored between opposing walls of the body and carrying electrodes disposed on surfaces of the membranes. The body has a first pair of opposing walls and a second pair of opposing walls orthogonal to the first pair that define a chamber, a plurality of membranes having a correspond electrode layer over a surface, the plurality of membranes disposed in the chamber, anchored between the first pair of opposing walls of the body to provide plural compartments, a first set of ports coupled to a first set of the plural compartments, the first set of ports disposed in corresponding portions of a first one of the first pair of opposing walls of the body, with a second one of the first pair of opposing walls of the body being a solid portion of the body; and a second set of ports coupled to a second different set of the plural compartments, the second set of ports disposed in corresponding portions of the second one of the first pair of opposing walls of the body, with the first one of the first pair of walls of the body being a solid portion of the body.


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