The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2022
Filed:
Jun. 20, 2019
Skyverse Technology Co., Ltd., Guangdong, CN;
Lu Chen, Guangdong, CN;
Le Yang, Guangdong, CN;
Yanzhong Ma, Beijing, CN;
Chaoqian Zhang, Beijing, CN;
SKYVERSE TECHNOLOGY CO., LTD., Guangdong, CN;
Abstract
Disclosed are a testing apparatus and a testing method. When the testing apparatus is used to test a sample () to be tested, a first detection apparatus () and a second detection apparatus () can be switched by means of an objective lens switching apparatus (), so as to acquire height information and structure information of the sample () to be tested. In the process, the sample () to be tested does not need to be transferred between testing apparatuses, thus, not only is pollution potentially created in the process of transferring the sample () to be tested avoided, and the probability of the sample () to be tested being polluted in the testing process reduced, but also a region to be tested of the sample () to be tested does not need to be determined repeatedly, improving the testing speed for the sample () to be tested.