The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2022
Filed:
Dec. 09, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Steven Mark Reedy, San Ramon, CA (US);
Simon Yavelberg, Cupertino, CA (US);
Jeonghoon Oh, Saratoga, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Andrew J. Nagengast, Sunnyvale, CA (US);
Samuel Chu-Chiang Hsu, Palo Alto, CA (US);
Gautam Shashank Dandavate, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.