The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2022

Filed:

Dec. 09, 2019
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Steven Mark Reedy, San Ramon, CA (US);

Simon Yavelberg, Cupertino, CA (US);

Jeonghoon Oh, Saratoga, CA (US);

Steven M. Zuniga, Soquel, CA (US);

Andrew J. Nagengast, Sunnyvale, CA (US);

Samuel Chu-Chiang Hsu, Palo Alto, CA (US);

Gautam Shashank Dandavate, Sunnyvale, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/32 (2012.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B24B 37/32 (2013.01); H01L 21/68721 (2013.01);
Abstract

Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.


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