The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2022
Filed:
Sep. 17, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Bon-Woong Koo, Andover, MA (US);
Ajdin Sarajlic, Bedford, NH (US);
Ronald Johnson, Gloucester, MA (US);
Nunzio V. Carbone, Hamilton, MA (US);
Peter Ewing, South Berwick, ME (US);
Mervyn Deegan, South Hamilton, MA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/08 (2013.01); H01J 37/3171 (2013.01); H01J 2237/0815 (2013.01);
Abstract
A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.