The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2022

Filed:

Mar. 15, 2021
Applicant:

Meta Platforms Technologies, Llc, Menlo Park, CA (US);

Inventors:

Matthew E. Colburn, Woodinville, WA (US);

Giuseppe Calafiore, Redmond, WA (US);

Matthieu Charles Raoul Leibovici, Seattle, WA (US);

Maxwell Parsons, Seattle, WA (US);

Assignee:

Meta Platforms Technologies, LLC, Menlo Park, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); H01L 21/308 (2006.01); H01L 21/306 (2006.01); F21V 8/00 (2006.01); G02B 27/01 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G02B 5/1857 (2013.01); G02B 6/0036 (2013.01); G02B 6/0065 (2013.01); G02B 27/0172 (2013.01); G03F 7/001 (2013.01); H01L 21/306 (2013.01); H01L 21/308 (2013.01); H01L 21/3081 (2013.01); H01L 21/3083 (2013.01); G02B 2027/0123 (2013.01); G02B 2027/0178 (2013.01);
Abstract

A lithographic patterning of a resist is performed to create a mandrel over a substrate. A deposition of one or more functional materials on the mandrel is performed. And each functional material has a respective refractive index. A selective removal of the mandrel is performed to create a plurality of grating elements formed from the one or more functional materials. The plurality of grating elements are self-aligned and form a diffraction grating. Each grating element may have a heterogenous refractive index (e.g., substantial normal to and/or parallel to a surface of the substrate). The diffraction grating may be used in a near-eye display.


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