The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2022

Filed:

Feb. 23, 2021
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Naoki Hiramatsu, Yokohama Kanagawa, JP;

Yosuke Akimoto, Yokohama Kanagawa, JP;

Hiroaki Yamazaki, Yokohama Kanagawa, JP;

Yumi Hayashi, Ayase Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01); G01N 33/00 (2006.01); G01N 27/18 (2006.01); G01N 27/04 (2006.01);
U.S. Cl.
CPC ...
G01N 33/005 (2013.01); G01N 27/045 (2013.01); G01N 27/18 (2013.01); G01N 27/226 (2013.01); G01N 27/228 (2013.01); G01N 2027/222 (2013.01);
Abstract

According to one embodiment, a sensor includes a base body, and a first sensor part. The first sensor part includes fixed and movable electrode members, and first and second support members. The fixed electrode member includes a fixed electrode fixed to the base body. The movable electrode member includes a movable electrode. The movable electrode member includes first and second movable portions, and a third movable portion between the first and second movable portions. The first support member is fixed to the base body and connected with the first movable portion. The second support member is fixed to the base body and connected with the second movable portion. The first and second support members support the movable electrode member to provide a first gap between the fixed and movable electrode members. The fixed electrode member includes first, second, and third fixed electrode portions facing the movable portion.


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