The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2022

Filed:

Mar. 16, 2018
Applicant:

Dai-ichi Seiko Co., Ltd., Kyoto, JP;

Inventors:

Kenji Ogata, Ogori, JP;

Shogo Kurogi, Ogori, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/22 (2006.01); G01N 29/02 (2006.01); G01N 29/036 (2006.01); G01N 29/24 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
G01N 29/222 (2013.01); G01N 29/022 (2013.01); G01N 29/036 (2013.01); G01N 29/2437 (2013.01); H01L 41/0986 (2013.01); G01N 2291/014 (2013.01); G01N 2291/021 (2013.01); G01N 2291/0256 (2013.01); G01N 2291/02809 (2013.01);
Abstract

A through-hole () is disposed in a supporting substrate (). Plate-shaped beams ((A,B)) each includes a piezoelectric element, extends from an edge of the through-hole () toward an opposite edge to close a part of the through-hole (), supports a substance adsorption film to which a constitutive substance to be detected adheres, and has a vibration frequency that is varied due to adhesion of the constitutive substance to the substance adsorption film. Drive electrodes () apply a voltage to the piezoelectric element to vibrate and deform the beams (). Detection electrodes () detect information about the vibration frequencies of the beams ().


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