The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2022
Filed:
May. 02, 2019
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Sufi Zafar, Briarcliff Manor, NY (US);
Steven J. Holmes, Ossining, NY (US);
Bruce B. Doris, Slingerlands, NY (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/414 (2006.01); G01N 27/327 (2006.01); H01L 21/02 (2006.01); H01L 29/06 (2006.01); H01L 21/8232 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4145 (2013.01); G01N 27/3278 (2013.01); H01L 21/02472 (2013.01); H01L 21/02554 (2013.01); H01L 21/8232 (2013.01); H01L 29/0669 (2013.01);
Abstract
An electrochemical sensor array includes a thermal oxide configured to interface with one or more analytes. There is a transistor device layer that includes a plurality of field effect transistors (FETs) on top of the thermal oxide. A contact and wiring structure layer is on top of the transistor device layer and operative to couple to control nodes of each of the plurality of FETs. The contact and wiring structure are on a side opposite to that of the thermal oxide.