The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2022
Filed:
Mar. 05, 2019
Applicant:
Central Glass Company, Limited, Yamaguchi, JP;
Inventors:
Assignee:
CENTRAL GLASS COMPANY, LIMITED, Yamaguchi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C01B 7/24 (2006.01); H01L 21/3065 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
C09K 13/00 (2013.01); C01B 7/24 (2013.01); H01L 21/3065 (2013.01); H01L 21/32135 (2013.01);
Abstract
A substrate processing gas of the present invention contains IF; and IF, in which a content of the IFis equal to or more than 1 ppm and equal to or less than 2% on a volume basis with respect to a total amount of the IFand the IF.