The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2022

Filed:

Aug. 26, 2020
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Naoari Shibata, Kawaguchi, JP;

Norihiko Ochi, Kawasaki, JP;

Junri Ishikura, Tokyo, JP;

Masayuki Morohashi, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/165 (2006.01); B41J 25/00 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
B41J 25/006 (2013.01); B41J 2/165 (2013.01); B41J 2/16517 (2013.01); H01L 51/0005 (2013.01);
Abstract

An inkjet apparatus includes an inkjet head, a scanning mechanism, a surrounding portion surrounding a predetermined region in which the inkjet head is moved by the scanning mechanism in plan view of the substrate surface and which comprises a height at which a nozzle surface of the inkjet head is disposed in side view of the substrate surface, and a vapor supply portion provided outside the substrate surface and in the region surrounded by the surrounding portion in plan view of the substrate surface. The scanning mechanism is configured to control relative positions of the inkjet head and the substrate surface. The vapor supply portion is configured to supply a vapor of the same material as a component of a solvent contained in the ink to the region surrounded by the surrounding portion.


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