The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2022

Filed:

Mar. 06, 2020
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Seiichiro Ogura, Minowa-machi, JP;

Ryuta Nishizawa, Nagano, JP;

Keiichi Yamaguchi, Ina, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/053 (2006.01); G01P 3/02 (2006.01); H01L 23/552 (2006.01); H01L 41/047 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
H01L 41/053 (2013.01); G01P 3/02 (2013.01); H01L 23/552 (2013.01); H01L 41/047 (2013.01); H01L 41/1132 (2013.01); H01L 41/1134 (2013.01);
Abstract

The vibrator device includes: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element. In addition, the vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion the support portion, and a shielding portion that is connected to the beam portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties.


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