The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2022

Filed:

Feb. 19, 2020
Applicant:

Industry-university Cooperation Foundation Hanyang University, Seoul, KR;

Inventors:

Tae Whan Kim, Seoul, KR;

Jun Gyu Lee, Daegu, KR;

Hyun Soo Jung, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 29/792 (2006.01); G11C 16/14 (2006.01); H01L 29/423 (2006.01); H01L 27/11565 (2017.01);
U.S. Cl.
CPC ...
H01L 29/7926 (2013.01); G11C 16/14 (2013.01); H01L 27/11565 (2013.01); H01L 29/4234 (2013.01);
Abstract

A non-volatile memory device is provided. The non-volatile memory device comprises a semiconductor channel layer, a tunneling layer, a charge trap layer, and a blocking insulating layer arranged in sequence. A plurality of control gate electrodes are disposed on the blocking insulating layer. An inter-cell insulating layer is disposed between the control gate electrodes. A spacer insulating film is disposed between the control gate electrode and the inter-cell insulating layer, and the spacer insulating film has a lower dielectric constant than the inter-cell insulating layer. The charge trap layer extends under the plurality of control gate electrodes and is disposed under the inter-cell insulating layer and the spacer insulating film.


Find Patent Forward Citations

Loading…