The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2022
Filed:
Nov. 19, 2018
Applicant:
Industry-university Cooperation Foundation Hanyang University, Seoul, KR;
Inventors:
Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/11582 (2017.01); H01L 27/11556 (2017.01); H01L 27/1157 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 27/1157 (2013.01);
Abstract
A vertical memory device and a method of fabricating the same are proposed. The vertical memory device includes a gate stack structure in which gates and interlayer insulating layers for insulating the gates are alternately laminated on a substrate and multiple memory cell areas and inter-memory cell areas are divided in a first direction perpendicular to the substrate; a channel structure extending in the first direction from the substrate to penetrate the gate stack structure; and charge storage elements disposed between the gate stack structure and the channel structure and sequentially formed to be embedded in the gate stack structure.