The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2022
Filed:
Dec. 05, 2018
Applicant:
Idemitsu Kosan Co., Ltd., Tokyo, JP;
Inventors:
Kazuaki Ebata, Sodegaura, JP;
Nozomi Tajima, Sodegaura, JP;
Assignee:
Idemitsu Kosam Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C04B 35/453 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); H01L 29/786 (2006.01); C04B 35/01 (2006.01); H01L 29/66 (2006.01); H01L 29/22 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02554 (2013.01); C04B 35/01 (2013.01); C04B 35/453 (2013.01); C23C 14/08 (2013.01); C23C 14/3414 (2013.01); C23C 14/352 (2013.01); H01L 21/02565 (2013.01); H01L 21/02631 (2013.01); H01L 29/22 (2013.01); H01L 29/66969 (2013.01); H01L 29/7869 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3284 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/3293 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/6565 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/77 (2013.01); C04B 2235/80 (2013.01);
Abstract
A sputtering target including an oxide that includes an indium (In) element, a tin (Sn) element, a zinc (Zn) element and an aluminum (Al) element, wherein the oxide includes a homologous structure compound represented by InAlO(ZnO)(m is 0.1 to 10) and a bixbyite structure compound represented by InO.