Method for forming pressure sensor involves filling a chamber with non compressible fluid and shaping etched cladding to convert external pressure within chamber by anisotropic stress

Abstract

A method for forming a pressure sensor is provided wherein an optical fibre is provided, the optical fibre comprising a core, a cladding surrounding the core, and a birefringence structure for inducing birefringence in the core. The birefringence structure comprises first and second holes enclosed within the cladding and extending parallel to the core. A portion of the optical fibre comprising of the core and the birefringence structure is encased within a chamber, wherein the chamber is defined by a housing comprising a pressure transfer element for equalising pressure between the inside and the outside of the housing. An optical sensor is provided along the core of the optical fibre. The cladding is internally etched by flowing an etchant through the first and second holes along a length of the portion of optical fibre which comprises the optical sensor so as to increase the width of the first and second holes. The chamber is filled with a substantially non-compressible fluid. Consequently, the etched cladding is shaped so as to convert an external pressure provided by the non-compressible fluid within the chamber to an anisotropic stress in the optical sensor.