The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2022
Filed:
Jun. 19, 2019
Applicant:
Hutchinson Technology Incorporated, Hutchinson, MN (US);
Inventors:
Matthew S. Lang, Excelsior, MN (US);
Lawrence E. LaLonde, Lakeland, MN (US);
Kyle T. Tobias, Eleva, WI (US);
Assignee:
Hutchinson Technology Incorporated, Hutchinson, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/04 (2006.01); G02B 5/02 (2006.01); G02B 5/20 (2006.01); G01J 1/16 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01J 1/0474 (2013.01); G01J 1/0488 (2013.01); G01J 1/16 (2013.01); G02B 5/0205 (2013.01); G02B 5/208 (2013.01); G03F 7/70591 (2013.01);
Abstract
A radiometer probe for matching a spectral sensitivity of a dry-film resist is provided. The radiometer probe includes a light probe and a filter-diffuser assembly connected to the light probe. The filter-diffuser assembly includes a filter housing configured to receive an optical diffuser positioned on a filter. The optical diffuser and the filter are separated by a spacer.