IDiyas

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11441109 B1

PDFFull Text
Date of Patent:
Sep. 13, 2022

Filed:

Mar. 05, 2019

Cleaning solution for removing dry etching residue and method for manufacturing semiconductor substrate using same

Applicant:

Mitsubishi Gas Chemical Company, Inc., Chiyoda-ku, JP;

Inventors:

Takahiro Kikunaga, Katsushika-ku, JP;

Hiroaki Horie, Katsushika-ku, JP;

Kimihiro Aoyama, Katsushika-ku, JP;

Nobuo Tajima, Katsushika-ku, JP;

Assignee:

MITSUBISHI GAS CHEMICAL COMPANY, INC., Chiyoda-ku, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Gregory E Webb

Int. Cl.
CPC ...
C11D 7/32 (2006.01); C11D 17/08 (2006.01); C11D 7/50 (2006.01); C11D 11/00 (2006.01); H01L 21/02 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
C11D 17/08 (2013.01); C11D 7/3209 (2013.01); C11D 7/3218 (2013.01); C11D 7/5022 (2013.01); C11D 11/0047 (2013.01); H01L 21/0206 (2013.01); H01L 21/02071 (2013.01); H01L 21/02178 (2013.01); H01L 21/32138 (2013.01);
Abstract

The present invention can provide a cleaning solution containing 0.2-20 mass % of an amine compound (A), 40-70 mass % of a water-soluble organic solvent (B), and water, wherein the amine compound (A) contains at least one selected from the group consisting of n-butylamine, hexylamine, octylamine, 1,4-butanediamine, dibutylamine, 3-amino-1-propanol, N,N-diethyl-1,3-diaminopropane, and bis(hexamethylene)triamine, and the water-soluble organic solvent (B) has a viscosity of 10 mPa·s or less at 20° C. and a pH of 9.0-14.

Find Patent Forward Citations

Loading…