The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2022
Filed:
Jun. 09, 2021
Applicant:
Fujifilm Electronic Materials U.s.a., Inc., N. Kingstown, RI (US);
Inventors:
Yuan Chen, Chandler, AZ (US);
Eduardo Ramirez Romero, Grapevine, TX (US);
Bryan Hinzie, Gilbert, AZ (US);
Assignee:
Fujifilm Electronic Materials U.S.A., Inc., N. Kingstown, RI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07C 45/82 (2006.01); B01D 3/00 (2006.01); C07C 45/78 (2006.01); B01D 3/14 (2006.01); B01D 39/16 (2006.01); B01D 36/00 (2006.01); C11D 11/00 (2006.01); B01J 20/26 (2006.01); C11D 7/50 (2006.01);
U.S. Cl.
CPC ...
C07C 45/783 (2013.01); B01D 3/143 (2013.01); B01D 36/00 (2013.01); B01D 39/16 (2013.01); B01J 20/261 (2013.01); C11D 7/5022 (2013.01); C11D 11/0047 (2013.01);
Abstract
The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used, e.g., as pre-wet liquids, solution developers, and cleaners in a multistep semiconductor manufacturing process.