The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2022

Filed:

Sep. 23, 2019
Applicant:

Samsung Display Co., Ltd., Yongin-Si, KR;

Inventor:

Seonghyeon Cheon, Gwacheon-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0007 (2013.01); H01L 51/001 (2013.01); H01L 51/0004 (2013.01); H01L 51/56 (2013.01);
Abstract

A method and a deposition apparatus of fabricating a display device is disclosed. The method may include providing a target substrate in an internal space of a chamber of a deposition apparatus, depositing a first material which includes an organic material and a deposition material coupled to each other, on the target substrate to form preliminary deposition layer, performing a preliminary decomposition step to remove the organic material, and performing a decomposition step to remove the organic material remained in the preliminary deposition layer and to form a deposition layer. The preliminary decomposition step may include heating the preliminary deposition layer, and the decomposition step may include injecting a second material containing an organic solvent onto the preliminary deposition layer.


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Cheon, Seonghyeon. (2022). Deposition apparatus and method of fabricating display device using the same (U.S. Patent No. 11437576). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11437576

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