The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Aug. 28, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); H01L 41/187 (2006.01); H01L 41/08 (2006.01); H01L 41/318 (2013.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H01L 41/187 (2013.01); B41J 2/14233 (2013.01); H01L 41/0805 (2013.01); H01L 41/1876 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14419 (2013.01); B41J 2202/03 (2013.01); H01L 41/0973 (2013.01); H01L 41/318 (2013.01);
Abstract
A piezoelectric element including an electrode and a piezoelectric layer provided on the electrode and having a perovskite structure including lead, zirconium, and titanium is provided. A radial distribution function obtained from an extended X-ray absorption fine structure of an L3 absorption edge of lead in an X-ray absorption spectrum of the piezoelectric layer at an interface with the electrode satisfies a formula (1) below≤1  (1)(in the formula (1), A represents an intensity of a peak attributable to oxygen atoms closest to lead atoms; and B represents an intensity of a peak attributable to oxygen atoms second closest to the lead atoms).