The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2022

Filed:

Mar. 13, 2020
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Chikara Kojima, Matsumoto, JP;

Koji Ohashi, Matsumoto, JP;

Hironori Suzuki, Chino, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); H01L 41/053 (2006.01); H01L 41/047 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1132 (2013.01); H01L 41/047 (2013.01); H01L 41/053 (2013.01);
Abstract

An ultrasonic device includes a base member including a first surface and a second surface different from the first surface, a vibration plate provided at the first surface of the base member, and a piezoelectric element provided at the vibration plate. The base member includes a hole formed from the first surface to the second surface, and a wall portion surrounding the hole. The vibration plate includes, when viewed in a direction from the first surface toward the second surface, a supporting portion overlapping the wall portion, and a blocking portion that overlaps the hole and blocks the hole. The piezoelectric element is laminated at the blocking portion. The supporting portion has a first Young's modulus. The blocking portion includes a first blocking portion having the first Young's modulus and a second blocking portion having a second Young's modulus smaller than the first Young's modulus.


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