The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Jun. 02, 2020
Canon Kabushiki Kaisha, Tokyo, JP;
Tatsuya Saito, Kawasaki, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A semiconductor apparatus comprising a first substrate that has a first surface and a second surface and is provided with a through hole extending through from the first surface to the second surface and an insulating layer and a conductive member that are provided in the through hole is provided. The through hole includes a first opening formed in the first substrate and a second opening provided between the first opening and the second surface. The first opening and the second opening each have a tapered shape whose opening width decreases from the first surface to the second surface, and a first taper angle formed by a side surface of the first opening and a plane parallel to the second surface is smaller than a second taper angle formed by a side surface of the second opening and a plane parallel to the second surface.